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Spokes and cathode voltage and discharge current oscillations in HiPIMS

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F15%3A00081050" target="_blank" >RIV/00216224:14310/15:00081050 - isvavai.cz</a>

  • Result on the web

  • DOI - Digital Object Identifier

Alternative languages

  • Result language

    angličtina

  • Original language name

    Spokes and cathode voltage and discharge current oscillations in HiPIMS

  • Original language description

    Oscillations were observed on cathode voltage and discharge current temporal evolution of HiPIMS pulse. The frequency of the oscillations depends only on the actual value of the discharge current for given pressure. Rotation of the spokes over the targetsurface and the frequency of the oscillations on cathode voltage and discharge current show different trends. The oscillations are observed at conditions where at least certain critical amount of spokes emerges.

  • Czech name

  • Czech description

Classification

  • Type

    O - Miscellaneous

  • CEP classification

    BL - Plasma physics and discharge through gases

  • OECD FORD branch

Result continuities

  • Project

    Result was created during the realization of more than one project. More information in the Projects tab.

  • Continuities

    P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Others

  • Publication year

    2015

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů