Spokes and cathode voltage and discharge current oscillations in HiPIMS
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F15%3A00081050" target="_blank" >RIV/00216224:14310/15:00081050 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Spokes and cathode voltage and discharge current oscillations in HiPIMS
Original language description
Oscillations were observed on cathode voltage and discharge current temporal evolution of HiPIMS pulse. The frequency of the oscillations depends only on the actual value of the discharge current for given pressure. Rotation of the spokes over the targetsurface and the frequency of the oscillations on cathode voltage and discharge current show different trends. The oscillations are observed at conditions where at least certain critical amount of spokes emerges.
Czech name
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Czech description
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Classification
Type
O - Miscellaneous
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2015
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů