On periodic oscillations observed on cathode voltage and discharge current during HIPIMS process
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F14%3A00074183" target="_blank" >RIV/00216224:14310/14:00074183 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
On periodic oscillations observed on cathode voltage and discharge current during HIPIMS process
Original language description
HiPIMS is promising technique for depositing thin layers. Instabilities accompanying HiPIMS also known as spokes were firstly observed independently by Anders et al and Kozyrev et al. Since then, OES and Langmuir probes are usually used for spoke diagnostics. In our research, periodic oscillations were not only observed on OES, but also on cathode voltage and discharge current. Alcatel SCM 650 sputtering system equipped with 20 cm titanium target and balanced magnetic field configuration was employed. Melec SIPP 2000 HiPIMS generator with maximum allowed voltage of 1000 V and maximum allowed current of 500 A was used. The generator was operated in constant voltage mode; discharge duration was 200 us with repetition frequency of 50 Hz. When the discharge current overreached typically 250 A, the periodic oscillations of discharge current and cathode voltage with frequency around 350 kHz were observed.
Czech name
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Czech description
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Classification
Type
O - Miscellaneous
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2014
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů