Understanding of hybrid PVD?PECVD process with the aim of growing hard nc-TiC/a-C:H coatings using industrial devices with a rotating cylindrical magnetron

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F14%3A00074185" target="_blank" >RIV/00216224:14310/14:00074185 - isvavai.cz</a>

Alternative codes found

RIV/68081723:_____/14:00431189

Result on the web

<a href="http://dx.doi.org/10.1016/j.surfcoat.2014.02.069" target="_blank" >http://dx.doi.org/10.1016/j.surfcoat.2014.02.069</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.surfcoat.2014.02.069" target="_blank" >10.1016/j.surfcoat.2014.02.069</a>

Result language

angličtina

Original language name

Understanding of hybrid PVD?PECVD process with the aim of growing hard nc-TiC/a-C:H coatings using industrial devices with a rotating cylindrical magnetron

Original language description

Titanium?carbon hard coatings were deposited by sputtering using a rotating cylindrical titanium target in an argon/acetylene gas mixture on cemented tungsten-carbide substrates which were placed on a DC-biasable holder to performa complex rotation around the central rotating cylindrical Ti cathode.While the optimal deposition process parameters to growthe coating of the highest possible hardness and lowfriction coefficientwere sought, the plasma parameters were monitored and correlated with the properties of the deposited coatings. The Ti/Ar line intensity and the cathode voltage exhibited a sudden drop at the conditions forwhich themaximal hardness was reached. EDX analyses also showed a sudden drop in the atomic concentration of titanium and a sudden increase in that of carbon at the same moment.

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BL - Plasma physics and discharge through gases

OECD FORD branch

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Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2014

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Surface & Coatings Technology

ISSN

0257-8972

e-ISSN

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Volume of the periodical

255

Issue of the periodical within the volume

September

Country of publishing house

CH - SWITZERLAND

Number of pages

6

Pages from-to

118-123

UT code for WoS article

000343348800019

EID of the result in the Scopus database

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