Determination of local thickness values of non-uniform thin films by imaging spectroscopic reflectometer with enhanced spatial resolution

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F17%3A00094433" target="_blank" >RIV/00216224:14310/17:00094433 - isvavai.cz</a>
Alternative codes found
RIV/00216305:26210/17:PU122109
Result on the web
<a href="http://dx.doi.org/10.1088/1361-6501/aa5534" target="_blank" >http://dx.doi.org/10.1088/1361-6501/aa5534</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1088/1361-6501/aa5534" target="_blank" >10.1088/1361-6501/aa5534</a>

Result language
angličtina
Original language name
Determination of local thickness values of non-uniform thin films by imaging spectroscopic reflectometer with enhanced spatial resolution
Original language description
In this paper an imaging spectroscopic reflectometer with enhanced spatial resolution is presented. Main features of its design, experimental data acquisition, i.e. maps of thin film spectral dependencies of local reflectance and the local thickness map determination are described. The ability of this instrument to characterize thin film thickness non-uniformity with high gradients is demonstrated on measurements of thin film edges. A comparison with an older device is also presented.
Czech name
—
Czech description
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Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
—
OECD FORD branch
10306 - Optics (including laser optics and quantum optics)

Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2017
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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