Spokes occurrence in HiPIMS discharge at different magnetic field strengths

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F17%3A00095242" target="_blank" >RIV/00216224:14310/17:00095242 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Spokes occurrence in HiPIMS discharge at different magnetic field strengths
Original language description
The effect of magnetic field strength on spoke behavior was studied by high-speed camera imaging and optical emission spectroscopy (OES) in HiPIMS discharge using 3-inch titanium target. The spoke shape, number of spokes and spoke rotation velocity were observed by employed camera. The camera enabled us to record two successive images in the same pulse with time delay of 3µs between them. The time-resolved measurements of chosen Ti atom, Ti ion, Ar atom and Ar ion lines were made. The experimental conditions covered discharge current up to 350 A, pressure range of 0.15-5 Pa and magnetic fields strength of 37, 72 and 91 mT.
Czech name
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Czech description
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>S - Specificky vyzkum na vysokych skolach<br>I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2017
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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