Single-shot spatial-resolved optical emission spectroscopy of argon and titanium species within the spoke

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F22%3A00119345" target="_blank" >RIV/00216224:14310/22:00119345 - isvavai.cz</a>

Result on the web

<a href="https://iopscience.iop.org/article/10.1088/1361-6463/ac2cae/meta" target="_blank" >https://iopscience.iop.org/article/10.1088/1361-6463/ac2cae/meta</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1088/1361-6463/ac2cae" target="_blank" >10.1088/1361-6463/ac2cae</a>

Result language

angličtina

Original language name

Single-shot spatial-resolved optical emission spectroscopy of argon and titanium species within the spoke

Original language description

The rotating plasma patterns, also known as ionisation zones or spokes, observed, among other discharges, in high power impulse magnetron sputtering discharge (HiPIMS) require non-invasive diagnostics favourable for a precise characterisation of their properties. In this contribution, the single-shot spatial-resolved optical emission spectroscopy of the spoke was conducted in non-reactive HiPIMS discharge using a titanium target. Investigated working pressures cover the conditions with the presence of localised, well-defined spokes. A fast photodiode and a cylindrical Langmuir probe were utilised to capture and determine the passing spoke position. These signals were synchronised with the acquisition of the optical emission spectrum by the intensified charge-coupled device detector. A large amount of single-shot data enabled the statistical analysis of the spoke. The optical emissions of argon atoms and ions and titanium atoms and ions were investigated in the passing spoke. It was found that the intensities of the spectral lines of the Ar and Ti species have the characteristic evolution for all studied spectral lines of this specific species within the spoke. The intensity evolutions are independent of the applied pressure. The evolution of the excitation temperatures determined by the Boltzmann plot method using the Ar II and Ti I and Ti II spectral lines remains constant within the spoke in the margin of standard error for all investigated pressures.

Czech name

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Czech description

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Type

J_imp - Article in a specialist periodical, which is included in the Web of Science database

CEP classification

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OECD FORD branch

10305 - Fluids and plasma physics (including surface physics)

Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year

2022

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Journal of Physics D: Applied Physics

ISSN

0022-3727

e-ISSN

1361-6463

Volume of the periodical

55

Issue of the periodical within the volume

3

Country of publishing house

GB - UNITED KINGDOM

Number of pages

13

Pages from-to

035205

UT code for WoS article

000709101500001

EID of the result in the Scopus database

2-s2.0-85118728156