Spatially resolved optical emission analysis of spokes in HiPIMS utilising Al, Cr, Cu, Ti, and W targets
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F24%3A00136282" target="_blank" >RIV/00216224:14310/24:00136282 - isvavai.cz</a>
Result on the web
<a href="https://iopscience.iop.org/article/10.1088/1361-6595/ad546b" target="_blank" >https://iopscience.iop.org/article/10.1088/1361-6595/ad546b</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1088/1361-6595/ad546b" target="_blank" >10.1088/1361-6595/ad546b</a>
Alternative languages
Result language
angličtina
Original language name
Spatially resolved optical emission analysis of spokes in HiPIMS utilising Al, Cr, Cu, Ti, and W targets
Original language description
Investigating spokes in high-power impulse magnetron sputtering discharge requires non-invasive diagnostic methods to characterise accurately spoke properties. A fast photodiode and a cylindrical Langmuir probe were employed to synchronise the moment of acquisition of the optical emission spectrum with the position of a passing spoke. This study provides statistical data analysis to bring insights into spoke characteristics in a non-reactive argon atmosphere, employing aluminium, chromium, copper, titanium, and tungsten targets. Utilising different target materials, the objective is to describe basic parameters such as shape, length, and propagation velocity of spokes and also analyse spoke inner parameters such as floating potential and spectral emission, under nearly identical experimental conditions. From the optical emission, the most prominent species within the spoke were determined. Additionally, the mechanism governing spoke movement was described using a phenomenological model.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10305 - Fluids and plasma physics (including surface physics)
Result continuities
Project
<a href="/en/project/LM2018097" target="_blank" >LM2018097: R&D centre for plasma and nanotechnology surface modifications</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2024
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Plasma Sources Science and Technology
ISSN
0963-0252
e-ISSN
1361-6595
Volume of the periodical
33
Issue of the periodical within the volume
6
Country of publishing house
GB - UNITED KINGDOM
Number of pages
11
Pages from-to
1-11
UT code for WoS article
001250044700001
EID of the result in the Scopus database
2-s2.0-85196371037