Spatially resolved study of spokes in reactive HiPIMS discharge

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F22%3A00125719" target="_blank" >RIV/00216224:14310/22:00125719 - isvavai.cz</a>

Result on the web

<a href="https://iopscience.iop.org/article/10.1088/1361-6595/ac6a0c" target="_blank" >https://iopscience.iop.org/article/10.1088/1361-6595/ac6a0c</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1088/1361-6595/ac6a0c" target="_blank" >10.1088/1361-6595/ac6a0c</a>

Result language

angličtina

Original language name

Spatially resolved study of spokes in reactive HiPIMS discharge

Original language description

Understanding mechanisms behind the formation and propagation of ionisation zones, so-called spokes, have been highly important since the first observations in HiPIMS discharges. To this day, however, a complete description is still lacking. This contribution gives an insight into the spokes in reactive Ar-N2 atmosphere using titanium target. The aim of this study is to describe not only global parameters of spokes such as their shape, length and propagation velocity but also provide a description of parameters evolving over the spoke, such as floating potential and spectral emission. The measurements of the latter clearly showed which species emission is most prominent and how it changes with transition from non-reactive argon discharge towards the discharge driven in a pure nitrogen atmosphere. Implications on the gas dynamics and discharge transitions are discussed.

Czech name

—

Czech description

—

Type

J_imp - Article in a specialist periodical, which is included in the Web of Science database

CEP classification

—

OECD FORD branch

10305 - Fluids and plasma physics (including surface physics)

Project

<a href="/en/project/LM2018097" target="_blank" >LM2018097: R&D centre for plasma and nanotechnology surface modifications</a><br>

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year

2022

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Plasma Sources Science and Technology

ISSN

0963-0252

e-ISSN

1361-6595

Volume of the periodical

31

Issue of the periodical within the volume

5

Country of publishing house

GB - UNITED KINGDOM

Number of pages

10

Pages from-to

1-10

UT code for WoS article

000798964300001

EID of the result in the Scopus database

2-s2.0-85131074436