Surface chemistry and initial growth of Al2O3 on plasma modified PTFE studied by ALD
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F17%3A00095963" target="_blank" >RIV/00216224:14310/17:00095963 - isvavai.cz</a>
Result on the web
<a href="http://www.sciencedirect.com/science/article/pii/S2468023016300529" target="_blank" >http://www.sciencedirect.com/science/article/pii/S2468023016300529</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.surfin.2016.10.005" target="_blank" >10.1016/j.surfin.2016.10.005</a>
Alternative languages
Result language
angličtina
Original language name
Surface chemistry and initial growth of Al2O3 on plasma modified PTFE studied by ALD
Original language description
An atmospheric-pressure DCSBD plasma in ambient air was used to clean and activate PTFE surfaces before low-temperature atomic layer deposition of Al2O3. It emerged that the fastest nucleation, leading to complete Al2O3 films, took place on PTFE samples that had been treated by plasma that led to the highest concentration of oxygen-containing functional groups. This condition required that some carbon contamination remained on the surface. Complete removal of surface carbon contamination to leave a surface close to stoichiometric PTFE was not beneficial from a film nucleation point of view, due to its lack of active nucleation sites. The results show that DCSBD treatment of PTFE in ambient air is an effective method of controlling and enhancing the nucleation process of thin films deposited by ALD on this substrate material.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10305 - Fluids and plasma physics (including surface physics)
Result continuities
Project
<a href="/en/project/LO1411" target="_blank" >LO1411: Development of Centre for low-cost plasma and nanotechnology surface modification</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2017
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Surfaces and Interfaces
ISSN
2468-0230
e-ISSN
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Volume of the periodical
6
Issue of the periodical within the volume
March
Country of publishing house
NL - THE KINGDOM OF THE NETHERLANDS
Number of pages
6
Pages from-to
223-228
UT code for WoS article
000408907800031
EID of the result in the Scopus database
2-s2.0-85007590883