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STUDY OF NITROGEN DOPED ORGANOSILICON PLASMA POLYMER THIN FILMS

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F17%3A00095984" target="_blank" >RIV/00216224:14310/17:00095984 - isvavai.cz</a>

  • Result on the web

  • DOI - Digital Object Identifier

Alternative languages

  • Result language

    angličtina

  • Original language name

    STUDY OF NITROGEN DOPED ORGANOSILICON PLASMA POLYMER THIN FILMS

  • Original language description

    Plasma polymerized hexamethyldisiloxane coatings have been attracting interest of many researches. Due to their properties, these materials have a great potential to succeed in large field of applications such as protective anti-scratch layers on plastic substrates, corrosion protection coatings, barrier films for pharmaceutical packaging etc. Functionalized organosilicon plasma polymers have been investigated for development of unique biomaterials. Addition of a suitable dopant during plasma polymerization is one of the ways to form specific functionalities modulating chemistry, physical properties as well as biocompatibility of the films. In the present work, low pressure RF capacitively coupled discharge was used to deposit organosilicon thin films with nitrogen-containing functional groups on single crystalline silicon substrates. Resulting plasma polymers were investigated by several methods aimed primarily at determination of chemical composition, surface microstructure and mechanical properties. The present study includes results of Fourier transform infrared spectroscopy, X-ray photoelectron spectroscopy, confocal microscopy, atomic force microscopy and nanoindentation, and their comparison with respect to deposition parameters.

  • Czech name

  • Czech description

Classification

  • Type

    D - Article in proceedings

  • CEP classification

  • OECD FORD branch

    10305 - Fluids and plasma physics (including surface physics)

Result continuities

  • Project

    <a href="/en/project/LO1411" target="_blank" >LO1411: Development of Centre for low-cost plasma and nanotechnology surface modification</a><br>

  • Continuities

    P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>S - Specificky vyzkum na vysokych skolach

Others

  • Publication year

    2017

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Article name in the collection

    8TH INTERNATIONAL CONFERENCE ON NANOMATERIALS - RESEARCH & APPLICATION (NANOCON 2016)

  • ISBN

    9788087294710

  • ISSN

  • e-ISSN

  • Number of pages

    6

  • Pages from-to

    727-732

  • Publisher name

    TANGER Ltd

  • Place of publication

    Brno

  • Event location

    Brno

  • Event date

    Oct 19, 2016

  • Type of event by nationality

    WRD - Celosvětová akce

  • UT code for WoS article

    000410656100126