Structural and Ferromagnetic Properties of Sputtered FeCoB/AlN Soft Magnetic Multilayers for GHz Applications

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F17%3A00099306" target="_blank" >RIV/00216224:14310/17:00099306 - isvavai.cz</a>
Result on the web
<a href="http://ieeexplore.ieee.org/abstract/document/7924320/" target="_blank" >http://ieeexplore.ieee.org/abstract/document/7924320/</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1109/TMAG.2017.2703175" target="_blank" >10.1109/TMAG.2017.2703175</a>

Result language
angličtina
Original language name
Structural and Ferromagnetic Properties of Sputtered FeCoB/AlN Soft Magnetic Multilayers for GHz Applications
Original language description
In this paper, we studied the structural and magnetic properties of amorphous FeCoB/AlN multilayered thin films with in-plane uniaxial magnetic anisotropy based on the Fe-28% Co-20% B (at. %) alloy, deposited on 8 '' Si/200 nm-thermal-SiO2 wafers in an industrial, high-throughput magnetron sputtering system.
Czech name
—
Czech description
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Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
—
OECD FORD branch
10302 - Condensed matter physics (including formerly solid state physics, supercond.)

Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2017
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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