Use of the Richardson extrapolation in optics of inhomogeneous layers: Application to optical characterization
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F18%3A00104689" target="_blank" >RIV/00216224:14310/18:00104689 - isvavai.cz</a>
Result on the web
<a href="https://onlinelibrary.wiley.com/doi/abs/10.1002/sia.6473" target="_blank" >https://onlinelibrary.wiley.com/doi/abs/10.1002/sia.6473</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1002/sia.6473" target="_blank" >10.1002/sia.6473</a>
Alternative languages
Result language
angličtina
Original language name
Use of the Richardson extrapolation in optics of inhomogeneous layers: Application to optical characterization
Original language description
A new approach to calculation of optical quantities of inhomogeneous layers is presented. In this approach, the Richardson extrapolation is used to improve the accuracy of the method, in which the inhomogeneous layer is approximated by a stack of thin homogeneous layers. The results presented in this paper are based on the assumption that the media are isotropic and the inhomogeneity is along the axis normal to the boundary. The results obtained by the new method are compared with those obtained without the Richardson extrapolation. The Richardson extrapolation brings significant improvement in accuracy, especially if the number of approximating layers is large. Moreover, the method using the Richardson extrapolation proceeds in steps with an error estimate available in each step; thus, the calculation can be stopped when the desired accuracy is reached. The use of the method is illustrated by means of the optical characterization of strongly inhomogeneous film of non-stoichiometric silicon nitride.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10306 - Optics (including laser optics and quantum optics)
Result continuities
Project
<a href="/en/project/LO1411" target="_blank" >LO1411: Development of Centre for low-cost plasma and nanotechnology surface modification</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2018
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Surface and Interface Analysis
ISSN
0142-2421
e-ISSN
1096-9918
Volume of the periodical
50
Issue of the periodical within the volume
7
Country of publishing house
US - UNITED STATES
Number of pages
9
Pages from-to
757-765
UT code for WoS article
000434647100011
EID of the result in the Scopus database
2-s2.0-85047660841