Optics of Inhomogeneous Thin Films with Defects: Application to Optical Characterization

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F21%3A00121114" target="_blank" >RIV/00216224:14310/21:00121114 - isvavai.cz</a>

Result on the web

<a href="https://www.mdpi.com/2079-6412/11/1/22" target="_blank" >https://www.mdpi.com/2079-6412/11/1/22</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.3390/coatings11010022" target="_blank" >10.3390/coatings11010022</a>

Result language

angličtina

Original language name

Optics of Inhomogeneous Thin Films with Defects: Application to Optical Characterization

Original language description

This review paper is devoted to optics of inhomogeneous thin films exhibiting defects consisting in transition layers, overlayers, thickness nonuniformity, boundary roughness and uniaxial anisotropy. The theoretical approaches enabling the inclusion of these defects into formulae expressing the optical quantities of these inhomogeneous thin films are summarized. These approaches are based on the recursive and matrix formalisms for the transition layers and overlayers, averaging of the elements of the Mueller matrix using local thickness distribution or polynomial formulation for the thickness nonuniformity, scalar diffraction theory and Rayleigh-Rice theory or their combination for boundary roughness and Yeh matrix formalism for uniaxial anisotropy. The theoretical results are illustrated using selected examples of the optical characterization of the inhomogeneous polymer-like thin films exhibiting the combination of the transition layers and thickness nonuniformity and inhomogeneous thin films of nonstoichiometric silicon nitride with the combination of boundary roughness and uniaxial anisotropy. This characterization is realized by variable angle spectroscopic ellipsometry and spectroscopic reflectometry. It is shown that using these optical techniques, the complete optical characterization of the mentioned thin films can be performed. Thus, it is presented that the values of all the parameters characterizing these films can be determined.

Czech name

—

Czech description

—

Type

J_imp - Article in a specialist periodical, which is included in the Web of Science database

CEP classification

—

OECD FORD branch

20506 - Coating and films

Project

<a href="/en/project/LM2018097" target="_blank" >LM2018097: R&D centre for plasma and nanotechnology surface modifications</a><br>

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2021

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Coatings

ISSN

2079-6412

e-ISSN

2079-6412

Volume of the periodical

11

Issue of the periodical within the volume

1

Country of publishing house

CH - SWITZERLAND

Number of pages

31

Pages from-to

22

UT code for WoS article

000610021300001

EID of the result in the Scopus database

2-s2.0-85098858760