Optical Characterization of Thin Films Exhibiting Defects

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F18%3A00104687" target="_blank" >RIV/00216224:14310/18:00104687 - isvavai.cz</a>
Result on the web
<a href="https://link.springer.com/chapter/10.1007/978-3-319-75325-6_10" target="_blank" >https://link.springer.com/chapter/10.1007/978-3-319-75325-6_10</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1007/978-3-319-75325-6_10" target="_blank" >10.1007/978-3-319-75325-6_10</a>

Result language
angličtina
Original language name
Optical Characterization of Thin Films Exhibiting Defects
Original language description
In this chapter the influence of the main defects on the optical characterization of thin films is described. These defects are random roughness of boundaries, thickness non-uniformity, optical inhomogeneity corresponding to refractive index profiles, overlayers and transition layers. The theoretical approaches and the formulae for the corresponding optical quantities of the thin films exhibiting these defects are presented. The attention is concentrated on the ellipsometric parameters and reflectance of these thin films belonging to the specular reflection. The selected numerical examples illustrating the influence of the defects are introduced. Several experimental examples of the optical characterization of the thin films with the defects are also shown. The discussion of both the numerical and experimental results is carried out too.
Czech name
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Czech description
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Project
<a href="/en/project/LO1411" target="_blank" >LO1411: Development of Centre for low-cost plasma and nanotechnology surface modification</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2018
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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