Roll-to-roll surface etching of polymers using hydrogen plasma at atmospheric pressure

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F18%3A00106632" target="_blank" >RIV/00216224:14310/18:00106632 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Roll-to-roll surface etching of polymers using hydrogen plasma at atmospheric pressure
Original language description
This paper reports on plasma surface etching of three different polymers using a low-temperature (80°C) atmospheric-pressure plasma generated in pure hydrogen by a diffuse coplanar surface barrier discharge. Flexible polymer foils were plasma-modified in roll-to-roll configuration. Three polymers, polyethylene naphthalate (PEN), polyethylene terephthalate (PET), and polyimide (PI) foils were exhibited to the hydrogen plasma etching. Scanning electron microscopy was used to determine the change in the thickness of the samples from the measurement of cross-section images of polymer foils. As shown, the etching rate of tested samples was of the order of ~10-100 nm.min-1. Therefore, the presented method is suitable for precise etching of nanostructures and thin polymer film or flexible polymer substrates. © 2018 TANGER Ltd. All Rights Reserved.
Czech name
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Czech description
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Project
<a href="/en/project/LO1411" target="_blank" >LO1411: Development of Centre for low-cost plasma and nanotechnology surface modification</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2018
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
NANOCON 2017 - Conference Proceedings, 9th International Conference on Nanomaterials - Research and Application
ISBN
9788087294819
ISSN
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e-ISSN
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Number of pages
6
Pages from-to
283-288
Publisher name
TANGER Ltd.
Place of publication
Ostrava, Czech Republic
Event location
Hotel Voronez I Brno, Czech Republic
Event date
Jan 1, 2017
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
000452823300047

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