Study of W-B-C thin films prepared by magnetron sputtering using a combinatorial approach

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F19%3A00107594" target="_blank" >RIV/00216224:14310/19:00107594 - isvavai.cz</a>

Result on the web

<a href="https://www.sciencedirect.com/science/article/pii/S026343681930352X?via%3Dihub" target="_blank" >https://www.sciencedirect.com/science/article/pii/S026343681930352X?via%3Dihub</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.ijrmhm.2019.105066" target="_blank" >10.1016/j.ijrmhm.2019.105066</a>

Result language

angličtina

Original language name

Study of W-B-C thin films prepared by magnetron sputtering using a combinatorial approach

Original language description

X-B-C materials, where X is a transition metal such as Mo, W or Ta, have recently gained attention as possible materials for protective coatings used in material machining. In this study, a combinatorial approach was used to deposit a total of 182 coatings with a wide composition range using pulsed-DC magnetron sputtering. The coatings were prepared either in conditions, where a comparatively lower energy was delivered onto the growing coating, i.e. at ambient temperature and without applied bias, or in conditions where the coating received higher energy, i.e. at 500 °C with a bias voltage of -100 V, to study the effect of energy flow on the coating structure and properties. The coating structure was examined and four different types of diffractograms have been observed: amorphous, short range ordered, crystalline W and nanocrystalline WB2. No other crystalline phases were detected. The measured hardness of the coatings was between 9.7 and 29.7 GPa and was independent of the carbon content, however, it increased with the boron content and decreased with the tungsten content in the composition region studied. The hardest coatings exhibited an amorphous structure. The effective elastic modulus ranged from 170 to 340 GPa and increased with the boron and tungsten contents. The highest moduli were obtained for coatings exhibiting a crystalline W phase. Coatings deposited at high energy flow to the growing coating generally exhibited higher hardness and comparable elastic modulus to their counterparts with a similar composition prepared without heating or bias.

Czech name

—

Czech description

—

Type

J_imp - Article in a specialist periodical, which is included in the Web of Science database

CEP classification

—

OECD FORD branch

10305 - Fluids and plasma physics (including surface physics)

Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2019

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

International Journal of Refractory Metals and Hard Materials

ISSN

0263-4368

e-ISSN

—

Volume of the periodical

85

Issue of the periodical within the volume

December

Country of publishing house

GB - UNITED KINGDOM

Number of pages

8

Pages from-to

1-8

UT code for WoS article

000490047100021

EID of the result in the Scopus database

2-s2.0-85071020896