Predictive simulation of antenna effect in PVD processes using fluid models

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F19%3A00113069" target="_blank" >RIV/00216224:14310/19:00113069 - isvavai.cz</a>
Result on the web
<a href="https://www.sciencedirect.com/science/article/abs/pii/S0257897219310369" target="_blank" >https://www.sciencedirect.com/science/article/abs/pii/S0257897219310369</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.surfcoat.2019.125045" target="_blank" >10.1016/j.surfcoat.2019.125045</a>

Result language
angličtina
Original language name
Predictive simulation of antenna effect in PVD processes using fluid models
Original language description
We present numerical simulation of an ion-based physical vapor deposition coating process on a realistic part. The simulation is performed using a fluid model. By correlating the simulated ion flux to the surface of the coated part with experimentally measured thickness of the coating at the same conditions, it is shown that the model is capable of capturing the so-called antenna effect (edge effect). This local increase of coating thickness close to sharp edges of the part is a consequence of the plasma sheath of a negatively biased coated part. Additionally, we assess the sensitivity of the model to the boundary conditions imposed.
Czech name
—
Czech description
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Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
—
OECD FORD branch
20501 - Materials engineering

Project
<a href="/en/project/LM2018097" target="_blank" >LM2018097: R&D centre for plasma and nanotechnology surface modifications</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2019
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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