Simulating ion flux to 3D parts in vacuum arc coating: Investigating effect of part size using novel particle-based model
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F22%3A00129519" target="_blank" >RIV/00216224:14310/22:00129519 - isvavai.cz</a>
Result on the web
<a href="https://www.sciencedirect.com/science/article/abs/pii/S0257897222008751" target="_blank" >https://www.sciencedirect.com/science/article/abs/pii/S0257897222008751</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.surfcoat.2022.128954" target="_blank" >10.1016/j.surfcoat.2022.128954</a>
Alternative languages
Result language
angličtina
Original language name
Simulating ion flux to 3D parts in vacuum arc coating: Investigating effect of part size using novel particle-based model
Original language description
This work presents a novel particle-based computational model capable of predicting coating distribution and composition on real parts in ion-based physical vapor deposition (PVD) processes. The model treats ions as particles (using test particle Monte Carlo method) and electrons as a fluid (using Boltzmann's relation). This combination makes it possible to simulate a realistic plasma sheath around a coated part and locally enhanced electric field around the part's edges. This simulation tool is instrumental especially in predicting the so-called “antenna-effect” - i.e. changes in coating thickness and composition near sharp edges of coated parts. It can also be used for quantifying the effect of coater loading or fixture design, as illustrated by simulating the effect of a top-plate on the coating distribution. The model is validated by two experimental data sets - a milling tool and a drill bit, both coated by hard nitride coatings in a vacuum arc process.
Czech name
—
Czech description
—
Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
—
OECD FORD branch
10305 - Fluids and plasma physics (including surface physics)
Result continuities
Project
<a href="/en/project/FW03010533" target="_blank" >FW03010533: Numerical models for optimization of innovative superhard materials</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2022
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Surface and Coatings Technology
ISSN
0257-8972
e-ISSN
1879-3347
Volume of the periodical
449
Issue of the periodical within the volume
November
Country of publishing house
CH - SWITZERLAND
Number of pages
9
Pages from-to
1-9
UT code for WoS article
000876480100002
EID of the result in the Scopus database
2-s2.0-85139992452