Ionisation fractions of sputtered titanium species at target and substrate region in HiPIMS

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F20%3A00114195" target="_blank" >RIV/00216224:14310/20:00114195 - isvavai.cz</a>
Result on the web
<a href="https://iopscience.iop.org/article/10.1088/1361-6595/ab82b1" target="_blank" >https://iopscience.iop.org/article/10.1088/1361-6595/ab82b1</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1088/1361-6595/ab82b1" target="_blank" >10.1088/1361-6595/ab82b1</a>

Result language
angličtina
Original language name
Ionisation fractions of sputtered titanium species at target and substrate region in HiPIMS
Original language description
In this paper, the ground state number densities of titanium atom and ion, ionised density fraction and ionised flux fraction were determined in a high power impulse magnetron sputtering process. Three regions of interest within the deposition chamber were studied; the magnetised plasma region, middle region, and substrate region. Pulse length and applied power were kept constant and working pressure and duty cycle were varied. The effective branching fractions method was utilised to evaluate the number densities of sputtered species from a measured optical emission signal. A biasable quartz crystal microbalance system was used to evaluate the ionised flux fraction and deposition rate. The highest ionised density fraction of 90% was reached in the target region for 1.2% duty cycle and it was mostly independent on working pressure. Moving from the target, the ionised density fraction was observed to decrease. In the substrate region for a duty cycle below 2% and the whole studied working pressure range, the ionised density fraction always reached at least 50%.
Czech name
—
Czech description
—

Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
—
OECD FORD branch
10305 - Fluids and plasma physics (including surface physics)

Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2020
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Similar results(10)