Ion flux characteristics and efficiency of the deposition processes in high power impulse magnetron sputtering of zirconium

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F10%3A00503522" target="_blank" >RIV/49777513:23520/10:00503522 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Ion flux characteristics and efficiency of the deposition processes in high power impulse magnetron sputtering of zirconium

Original language description

High power impulse magnetron sputtering of zirconium was investigated at the average target power density of up to 2.22 kW/cm2 in a pulse. The depositions were performed using a strongly unbalanced magnetron with a planar zirconium target of 100 mm diameter at the argon pressure of 1 Pa. The repetition frequency was 500 Hz at duty cycles ranging from 4% to 10%. Time-averaged mass spectroscopy was carried out at the substrate positions of 100 and 200 mm from the target. The increase in the average targetpower density from 0.97 kW/cm2 to 2.22 kW/cm2 in shortened voltage pulses (from 200 to 80 microseconds) at an average target power density of 100 W/cm2 in a period led to high fractions (21%-32%) of doubly charged zirconium ions in total ion fluxes ontothe substrate located 100 mm from the target. However, the respective fractions of singly charged zirconium ions decreased from 23% to 3%. It was observed that ion energy distributions were extended to high energies (up to 100 eV relativ

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BL - Plasma physics and discharge through gases

OECD FORD branch

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Project

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Continuities

Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

2010

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Journal of Applied Physics

ISSN

0021-8979

e-ISSN

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Volume of the periodical

108

Issue of the periodical within the volume

6

Country of publishing house

US - UNITED STATES

Number of pages

9

Pages from-to

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UT code for WoS article

000282646400017

EID of the result in the Scopus database

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