Process stabilization and a significant enhancement of the deposition rate in reactive high-power impulse magnetron sputtering of ZrO2 and Ta2O5 films

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F13%3A43920009" target="_blank" >RIV/49777513:23520/13:43920009 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1016/j.surfcoat.2013.10.052" target="_blank" >http://dx.doi.org/10.1016/j.surfcoat.2013.10.052</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.surfcoat.2013.10.052" target="_blank" >10.1016/j.surfcoat.2013.10.052</a>

Result language
angličtina
Original language name
Process stabilization and a significant enhancement of the deposition rate in reactive high-power impulse magnetron sputtering of ZrO2 and Ta2O5 films
Original language description
High-power impulse magnetron sputtering with a pulsed reactive gas (oxygen) flow control was used for high-rate reactive depositions of densified stoichiometric ZrO2 and Ta2O5 films onto floating substrates. The depositions were performed using a strongly unbalanced magnetron with a planar zirconium or tantalum target of 100 mm diameter in argon-oxygen gas mixtures at the total pressure close to 2 Pa. The repetition frequency was 500 Hz at the average target power density from 5 W/cm^2 to 103 W/cm^2 during a deposition. The duty cycles ranged from 2.5 % to 10 %. The target-to-substrate distance was 100 mm. For the same duty cycle of 10 %, the deposition rates were up to 140 nm/min for the ZrO2 films and up to 345 nm/min for the Ta2O5 films. The ZrO2 films were crystalline. They exhibited a refractive index of 2.19 - 2.22 and an extinction coefficient of 0.002 - 0.006. The Ta2O5 films were nanocrystalline. They exhibited a refractive index of 2.09 - 2.15 and an extinction coefficient of
Czech name
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Czech description
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Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
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Project
<a href="/en/project/GAP108%2F12%2F0393" target="_blank" >GAP108/12/0393: Hard nanocomposite coatings with enhanced toughness and unique properties</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2013
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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