A comparative study of sioxcyhz thin films deposited in trimethysilyl ACETATE/O2/Ar plasmas
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F20%3A00114379" target="_blank" >RIV/00216224:14310/20:00114379 - isvavai.cz</a>
Result on the web
<a href="https://doi.org/10.37904/nanocon.2019.8643" target="_blank" >https://doi.org/10.37904/nanocon.2019.8643</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.37904/nanocon.2019.8643" target="_blank" >10.37904/nanocon.2019.8643</a>
Alternative languages
Result language
angličtina
Original language name
A comparative study of sioxcyhz thin films deposited in trimethysilyl ACETATE/O2/Ar plasmas
Original language description
Plasma-polymerized SiOxCyHz thin films have been playing an important role in many research studies due to their wide range of applications. These materials are perspective for industrial applications as protective coatings of metals or plastic substrates, anti-reflection coatings for solar cells, low-k dielectrics for microelectronics, water-repellent barrier films etc. Materials based on organosilicon precursors prepared by PECVD technique have become interesting for bioapplications in recent years as well due to their ability to optimize protein adsorption and cell attachment. These coatings have a great potential e.g. in BioMEMS microfabrication or treatment of biosensors and surfaces of medical implants.In the present study, low pressure RF capacitive coupled discharge in mixture of trimethylsilyl acetate (TMSA) monomer with oxygen or argon was used to create hydrophobic SiOxCyHz coatings. This study is focused primarily on research of properties of resulting coatings (chemical composition, mechanical properties, optical properties, surface wettability and surface structure) in dependence on discharge parameters. Properties of created thin films were examined in dependence on the ratio of TMSA monomer and carrier gas flow rates during the deposition process. Influence of used carrier gas (O2 or Ar) on growth of TMSA-based plasma polymers is discussed in this study as well.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
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OECD FORD branch
21000 - Nano-technology
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2020
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
11th International Conference on Nanomaterials - Research & Application (NANOCON 2019)
ISBN
9788087294956
ISSN
2694-930X
e-ISSN
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Number of pages
6
Pages from-to
657-662
Publisher name
TANGER Ltd
Place of publication
Ostrava
Event location
Brno, Czech Republic
Event date
Oct 16, 2019
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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