Organosilicon plasma polymers deposited in trimethylsilyl acetate/CH4 plasma of capacitively coupled RF glow discharge
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F21%3A00119101" target="_blank" >RIV/00216224:14310/21:00119101 - isvavai.cz</a>
Result on the web
<a href="https://doi.org/10.37904/nanocon.2020.3773" target="_blank" >https://doi.org/10.37904/nanocon.2020.3773</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.37904/nanocon.2020.3773" target="_blank" >10.37904/nanocon.2020.3773</a>
Alternative languages
Result language
angličtina
Original language name
Organosilicon plasma polymers deposited in trimethylsilyl acetate/CH4 plasma of capacitively coupled RF glow discharge
Original language description
Thin solid films based on organosilicon monomers are perspective in many branches of industry as well as for bioapplications. In the present study, plasma of RF capacitively coupled glow discharge in gaseous mixture of trimethylsilyl acetate (TMSA) monomer and methane was used to create SiOxCyHz coatings. This study monitors properties of resulting thin films (surface chemistry, wettability, surface structure and mechanical properties) in dependency on deposition parameters. The main subject of the presented research is the investigation of the relationship between the above-mentioned properties of prepared organosilicon coatings and the flow rate ratio of TMSA monomer and CH4 carrier gas applied during deposition process.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
—
OECD FORD branch
20506 - Coating and films
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2021
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
NANOCON 2020: 12th International Conference on Nanomaterials - Research & Application
ISBN
9788087294987
ISSN
2694-930X
e-ISSN
—
Number of pages
6
Pages from-to
535-540
Publisher name
TANGER Ltd.
Place of publication
Ostrava
Event location
Brno
Event date
Oct 21, 2020
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
000664505500091