Ellipsometric characterization of highly non-uniform thin films with the shape of thickness non-uniformity modeled by polynomials

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F20%3A00114443" target="_blank" >RIV/00216224:14310/20:00114443 - isvavai.cz</a>
Result on the web
<a href="https://doi.org/10.1364/OE.380657" target="_blank" >https://doi.org/10.1364/OE.380657</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1364/OE.380657" target="_blank" >10.1364/OE.380657</a>

Result language
angličtina
Original language name
Ellipsometric characterization of highly non-uniform thin films with the shape of thickness non-uniformity modeled by polynomials
Original language description
A common approach to non-uniformity is to assume that the local thicknesses inside the light spot are distributed according to a certain distribution, such as the uniform distribution or the Wigner semicircle distribution. A model considered in this work uses a different approach in which the local thicknesses are given by a polynomial in the coordinates x and y along the surface of the film. An approach using the Gaussian quadrature is very efficient for including the influence of the non-uniformity on the measured ellipsometric quantities. However, the nodes and weights for the Gaussian quadrature must be calculated numerically if the non-uniformity is parameterized by the second or higher degree polynomial. A method for calculating these nodes and weights which is both efficient and numerically stable is presented. The presented method with a model using a second-degree polynomial is demonstrated on the sample of highly non-uniform polymer-like thin film characterized using variable-angle spectroscopic ellipsometry. The results are compared with those obtained using a model assuming the Wigner semicircle distribution.
Czech name
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Czech description
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Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10306 - Optics (including laser optics and quantum optics)

Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2020
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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