MAGNETRON SPUTTERING DEPOSITION OF HIGH ENTROPY NITRIDES FROM CHROMIUM-HAFNIUM-MOLYBDENUM-TANTALUM-WOLFRAM SYSTEM
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F21%3A00128613" target="_blank" >RIV/00216224:14310/21:00128613 - isvavai.cz</a>
Result on the web
<a href="https://doi.org/10.37904/nanocon.2021.4312" target="_blank" >https://doi.org/10.37904/nanocon.2021.4312</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.37904/nanocon.2021.4312" target="_blank" >10.37904/nanocon.2021.4312</a>
Alternative languages
Result language
angličtina
Original language name
MAGNETRON SPUTTERING DEPOSITION OF HIGH ENTROPY NITRIDES FROM CHROMIUM-HAFNIUM-MOLYBDENUM-TANTALUM-WOLFRAM SYSTEM
Original language description
High entropy alloys (HEAs) are multicomponent materials with at least five elements close to the equiatomic ratio. The multielement composition leads to many effects that stabilize solid solution phases instead of intermetallic compounds. It results in promising mechanical properties, high thermal stability, good corrosion resistance, etc. After the discovery of HEAs in 2004, the concept only concerned metallic materials. Later, the idea was extended to high entropy ceramics (carbides, nitrides, oxides). In this study, the high entropy nitrides (HENs) from the Cr-Hf-Mo-Ta-W system were deposited by magnetron sputtering from elemental segmented targets. Two series of samples were deposited under different nitrogen flow from 0 sccm to 20 sccm at ambient temperature and 700 °C. The coatings deposited at low nitrogen flow consist predominantly of metallic and amorphous phases. At higher nitrogen flow (above 10 sccm), the coatings mainly consist of multielement face-centered cubic nitride with nanometric grain size, which lattice parameter increases with increasing nitrogen content. The chemical composition of films varies as a function of nitrogen flow and temperature. With increasing nitrogen flow and temperature, the deposition rate decreases from 67 nm min-1 at ambient temperature with no nitrogen to 38 nm min-1 at 700 °C under 20 sccm nitrogen flow. The coatings revealed high hardness up to 26.6 GPa and Young’s modulus up to 531 GPa.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
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OECD FORD branch
10300 - Physical sciences
Result continuities
Project
<a href="/en/project/LM2018097" target="_blank" >LM2018097: R&D centre for plasma and nanotechnology surface modifications</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2021
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
13th International Conference on Nanomaterials - Research and Application, NANOCON 2021
ISBN
9788088365006
ISSN
2694-930X
e-ISSN
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Number of pages
6
Pages from-to
98-103
Publisher name
TANGER Ltd.
Place of publication
Ostrava
Event location
Brno, Czech Republic
Event date
Oct 20, 2021
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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