High-power-density sputtering of industrial-scale targets: Case study of (Al,Cr)N
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F24%3A00135407" target="_blank" >RIV/00216224:14310/24:00135407 - isvavai.cz</a>
Result on the web
<a href="https://www.sciencedirect.com/science/article/pii/S0264127523009693" target="_blank" >https://www.sciencedirect.com/science/article/pii/S0264127523009693</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.matdes.2023.112553" target="_blank" >10.1016/j.matdes.2023.112553</a>
Alternative languages
Result language
angličtina
Original language name
High-power-density sputtering of industrial-scale targets: Case study of (Al,Cr)N
Original language description
Large-scale sputter-deposition of hard protective coatings has not been prevalent as the large dimensions of the industrial targets posed an enormous technological challenge: only relatively low power (and plasma) densities could be achieved, resulting ultimately in poor performance of such coatings. Here, we introduce a novel sputtering technology allowing to reach high power densities for industrial tubular targets. This is realised on the principle of a longitudinal movement of a reduced-size magnetron inside the target. In doing so, peak power densities of 840 W/cm2 have been achieved for the overall power of 25 kW and the target dimensions of Ø110 × 510 mm. To demonstrate the effectiveness of the solution, we produced a series of cubic (Al,Cr)N coatings by sputtering an Al60Cr40 target. Most of the coatings have a stoichiometric composition, smooth surface and a moderate amount of growth defects. Significant improvements through recipe optimisation could be achieved resulting in mechanical properties (hardness, fracture toughness, wear resistance) being equal to and even exceeding those of the benchmark coatings produced by means of conventional sputtering and cathodic arc evaporation. Our results open up great potential of this novel sputtering technique for the coating industry.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10300 - Physical sciences
Result continuities
Project
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Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2024
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Materials and Design
ISSN
0264-1275
e-ISSN
1873-4197
Volume of the periodical
237
Issue of the periodical within the volume
January
Country of publishing house
GB - UNITED KINGDOM
Number of pages
12
Pages from-to
1-12
UT code for WoS article
001137797200001
EID of the result in the Scopus database
2-s2.0-85180014979