Development of a-C:H coatings doped with trimethylsilyl acetate prepared using plasma enhanced chemical vapor deposition
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F24%3A00137077" target="_blank" >RIV/00216224:14310/24:00137077 - isvavai.cz</a>
Result on the web
<a href="https://www.sciencedirect.com/science/article/pii/S0925963524004461" target="_blank" >https://www.sciencedirect.com/science/article/pii/S0925963524004461</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.diamond.2024.111233" target="_blank" >10.1016/j.diamond.2024.111233</a>
Alternative languages
Result language
angličtina
Original language name
Development of a-C:H coatings doped with trimethylsilyl acetate prepared using plasma enhanced chemical vapor deposition
Original language description
The main aim of the present study was to develop hard a-C:H:SiOx coatings prepared from the unique gaseous mixture of trimethylsilyl acetate (TMSAc) with methane using plasma of RF capacitively coupled glow discharge. Studied coatings were prepared using different methane ratios in TMSAc/CH4 gaseous mixtures ranging from 7.1 % to 85.7 %. Simultaneously, the influence of the power supplied to the discharge (25–100 W) on the properties of resulting coatings was investigated. The presented research work discusses in detail the evolution of chemical composition, mechanical characteristics, and optical properties of resulting coatings depending on variable CH4 ratio and discharge power. Within this study, various materials with the smooth surface structure were achieved. Applying low CH4 ratio and 25 W power led to the formation of soft SiOx CyHz coatings with high content of Si–O and –CH3 groups exhibiting hardness of approx. 0.95 GPa. Gradually increasing the CH4 ratio and discharge power up to the specified limit values (85 % and 100 W, respectively) induced structural changes, resulting in a-C:H:SiOx coatings with a remarkable hardness of 11 GPa and excellent fracture resistance. These attributes are of utmost importance in numerous industrial applications, including anticorrosive coatings, low-friction wear-resistant coatings to prolong the lifetime of car engines, biocompatible coatings, components for plastic molds, as well as parts for optical disc molds and textile machinery.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10300 - Physical sciences
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2024
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Diamond and Related Materials
ISSN
0925-9635
e-ISSN
1879-0062
Volume of the periodical
147
Issue of the periodical within the volume
August 2024
Country of publishing house
CH - SWITZERLAND
Number of pages
12
Pages from-to
1-12
UT code for WoS article
001258541800001
EID of the result in the Scopus database
2-s2.0-85196009432