Industrial reactive sputter deposition of TiZrN coatings: The role of nitrogen partial pressure

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F25%3A00140805" target="_blank" >RIV/00216224:14310/25:00140805 - isvavai.cz</a>

Result on the web

<a href="https://doi.org/10.1016/j.surfcoat.2025.131873" target="_blank" >https://doi.org/10.1016/j.surfcoat.2025.131873</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.surfcoat.2025.131873" target="_blank" >10.1016/j.surfcoat.2025.131873</a>

Result language

angličtina

Original language name

Industrial reactive sputter deposition of TiZrN coatings: The role of nitrogen partial pressure

Original language description

Reactive sputter deposition of TiN, ZrN, and TiZrN coatings at different nitrogen partial pressures was performed under industrial conditions using a combinatorial approach. For all coatings, the nitrogen content rose with increasing nitrogen partial pressure and then leveled off above a given pressure. The ZrN coatings exhibited a columnar structure irrespective of the nitrogen pressure used. In contrast, the microstructure of TiN and TiZrN varied depending on the nitrogen partial pressure. A different behavior of the crystallite size as a function of the nitrogen partial pressure was observed for TiN and ZrN. A strong dependence was noticed for TiN. This contrasted with the behavior of ZrN which had much smaller crystallites. Smaller crystallites were also observed in the TiZrN coatings and the influence of the nitrogen partial pressure and the Ti/(Ti + Zr) ratio on these coatings was weak. The coloration of the coatings was notably influenced by nitrogen partial pressure. The level of red for the TiN and TiZrN coatings and the yellow hue for the ZrN coatings significantly increased with nitrogen partial pressure. The hardness of all TiZrN coatings peaked at intermediate nitrogen partial pressures, which indicates that nitrogen partial pressure enables the optimization of mechanical properties. The highest measured hardness (31 GPa) was obtained at a Ti/(Ti + Zr) ratio of 0.50 although similar values were obtained irrespective of the metallic elements. This study demonstrates the potential to enhance the mechanical properties of TiN by incorporating Zr provided the correct nitrogen partial pressure is selected.

Czech name

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Czech description

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Type

J_imp - Article in a specialist periodical, which is included in the Web of Science database

CEP classification

—

OECD FORD branch

10305 - Fluids and plasma physics (including surface physics)

Project

—

Continuities

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year

2025

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Surface and Coatings Technology

ISSN

0257-8972

e-ISSN

1879-3347

Volume of the periodical

499

Issue of the periodical within the volume

March

Country of publishing house

CH - SWITZERLAND

Number of pages

13

Pages from-to

1-13

UT code for WoS article

001424165100001

EID of the result in the Scopus database

2-s2.0-85216840145