Influence of bias voltage on the microstructure and mechanical properties of TiZrN coatings prepared by reactive magnetron sputtering in industrial conditions

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F25%3A00141229" target="_blank" >RIV/00216224:14310/25:00141229 - isvavai.cz</a>

Result on the web

<a href="https://doi.org/10.1016/j.surfcoat.2025.132240" target="_blank" >https://doi.org/10.1016/j.surfcoat.2025.132240</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.surfcoat.2025.132240" target="_blank" >10.1016/j.surfcoat.2025.132240</a>

Result language

angličtina

Original language name

Influence of bias voltage on the microstructure and mechanical properties of TiZrN coatings prepared by reactive magnetron sputtering in industrial conditions

Original language description

TiZrN coatings were prepared using three bias voltages of −50 V, −100 V and −175 V via a combinatorial approach, which led to the coatings with different Ti/(Ti+Zr) values. The deposition rate of TiN and ZrN remained practically constant with increasing the bias voltage. The TiZrN coatings, however, exhibited a drop of 15% in their deposition rates with increasing the bias voltage. The microstructure of TiN and ZrN did not change with the bias voltage applied, unlike TiZrN, which underwent microstructural changes with increasing bias voltage. For all binary and ternary nitrides, the lattice parameter increased and crystallite size decreased with increasing the bias voltage. All TiN, ZrN and TiZrN coatings showed enhanced compressive stress with increasing the bias voltage. ZrN hardness peaked at the bias voltage of −100 V, in contrast to that of TiN, which exhibited a constant increase with the bias voltage and peaked at −175 V. In ternary nitrides, bias voltage significantly influenced the hardness values, whereas in the case of Ti/(Ti+Zr), the effect was minimal, especially at the higher bias voltages. For all binary and ternary coatings, H/E and H3/E increased with the bias voltage, indicating an enhanced wear resistance and resilience with increasing bias voltage.

Czech name

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Czech description

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Type

J_imp - Article in a specialist periodical, which is included in the Web of Science database

CEP classification

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OECD FORD branch

10305 - Fluids and plasma physics (including surface physics)

Project

—

Continuities

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year

2025

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Surface and Coatings Technology

ISSN

0257-8972

e-ISSN

1879-3347

Volume of the periodical

511

Issue of the periodical within the volume

September

Country of publishing house

CH - SWITZERLAND

Number of pages

11

Pages from-to

132240

UT code for WoS article

001498956400001

EID of the result in the Scopus database

2-s2.0-105005593456