MEMS Carbon Nanotubes Field Emission Pressure Sensor With Simplified Design: Performance and Field Emission Properties Study

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14740%2F15%3A00080659" target="_blank" >RIV/00216224:14740/15:00080659 - isvavai.cz</a>

Alternative codes found

RIV/00216305:26620/15:PU110876

Result on the web

<a href="http://ieeexplore.ieee.org/xpl/articleDetails.jsp?reload=true&arnumber=6933922" target="_blank" >http://ieeexplore.ieee.org/xpl/articleDetails.jsp?reload=true&arnumber=6933922</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1109/JSEN.2014.2363213" target="_blank" >10.1109/JSEN.2014.2363213</a>

Result language

angličtina

Original language name

MEMS Carbon Nanotubes Field Emission Pressure Sensor With Simplified Design: Performance and Field Emission Properties Study

Original language description

The pressure sensor application gained recently substantial interest in many fields of basic and applied research and applications. In this paper, microelectromechanical system (MEMS)-based pressure sensor contains nanostructured electrode consisting ofcarbon nanotube (CNT) array. CNTs are directly grown on such electrode by plasma-enhanced chemical vapor deposition method using microwave plasma torch at atmospheric pressure. This growth method enables us to use a simple electrode structure without need of buffer layer and time-consuming lithography process. Combination of CNTs field emission and MEMS membrane mechanical properties make possible to enhance sensitivity of the sensor. Field emission properties of CNTs are measured by newly developed system enabling us precise measurement of expecting properties, such as dependence on diaphragm (upper electrode) distance, applied voltage, and stability of the sensor.

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

JA - Electronics and optoelectronics

OECD FORD branch

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Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2015

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

IEEE Sensors Journal

ISSN

1530-437X

e-ISSN

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Volume of the periodical

15

Issue of the periodical within the volume

3

Country of publishing house

GB - UNITED KINGDOM

Number of pages

7

Pages from-to

1430-1436

UT code for WoS article

000346743600016

EID of the result in the Scopus database

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