Possible Applications of Freestanding Carbon Nanotubes in MEMS Technology

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26220%2F11%3APU93801" target="_blank" >RIV/00216305:26220/11:PU93801 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Possible Applications of Freestanding Carbon Nanotubes in MEMS Technology
Original language description
Carbon nanotubes (CNTs) are molecular-scale tubes of graphitic carbon with outstanding properties. They are among the stiffest and strongest fibers known, and have remarkable electronic properties and many other unique characteristics. In our experiment,CNTs were synthesized using plasma enhanced chemical vapor deposition on the silicon wafer with patterned iron catalytic layer. If the catalyst is only located in certain areas (patterned), then nanotubes grow only in those areas. The arrays with freestanding carbon nanotubes were created. It is possible to apply this method of CNTs preparation in many areas, such as sensor-based applications. For example, thanks to the CNTs dimensions is possible to increase the surface in capacitance pressure sensorsthat are one of the most using in microelectronic devices for pressure sensing. The novel MEMS structure was designed to be utilized as capacitance pressure sensor. The most applicable topology of the MEMS structure was chosen by means o
Czech name
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Czech description
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)<br>S - Specificky vyzkum na vysokych skolach

Publication year
2011
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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