Optical Characterization of Thin Films by Means of Imaging Spectroscopic Reflectometry

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14740%2F18%3A00106640" target="_blank" >RIV/00216224:14740/18:00106640 - isvavai.cz</a>

Result on the web

<a href="http://dx.doi.org/10.1007/978-3-319-75325-6_5" target="_blank" >http://dx.doi.org/10.1007/978-3-319-75325-6_5</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1007/978-3-319-75325-6_5" target="_blank" >10.1007/978-3-319-75325-6_5</a>

Result language

angličtina

Original language name

Optical Characterization of Thin Films by Means of Imaging Spectroscopic Reflectometry

Original language description

This chapter focuses on optical characterization of thin films by means of non-microscopic imaging spectroscopic reflectometry. This technique is primarily intended for characterization of thin films with an area non-uniformity in their optical properties. An advantage of the technique is the possibility to measure along a relatively large area of the measured films. The motivation for development and exploitation of this technique is also discussed. Essential features and implementation of the technique are given, as well as the basic experimental set-up of imaging spectroscopic reflectometers and the way the experimental data are obtained. The data processing methods are classified based on the purpose of the thin film measurement. Furthermore, this chapter presents examples of results of imaging spectroscopic reflectometry in the field of thin films. At the end of the chapter, potential applications of imaging spectroscopic reflectometry in other tasks are also briefly mentioned.

Czech name

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Czech description

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Type

J_imp - Article in a specialist periodical, which is included in the Web of Science database

CEP classification

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OECD FORD branch

10305 - Fluids and plasma physics (including surface physics)

Project

—

Continuities

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year

2018

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

OPTICAL CHARACTERIZATION OF THIN SOLID FILMS

ISSN

0931-5195

e-ISSN

—

Volume of the periodical

64

Issue of the periodical within the volume

2018

Country of publishing house

DE - GERMANY

Number of pages

35

Pages from-to

107-141

UT code for WoS article

000441388800007

EID of the result in the Scopus database

2-s2.0-85043764143