Determination of the surface roughness and refractive index of amorphous As40S60 lms deposited by spin coating

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216275%3A25310%2F04%3A00001377" target="_blank" >RIV/00216275:25310/04:00001377 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Determination of the surface roughness and refractive index of amorphous As40S60 lms deposited by spin coating
Original language description
An envelope method, based on the optical reection spectrum taken at normal incidence, has been successfully applied to the geometrical?optical characterization of thin dielectric lms having signicant surface roughness. Such a method allows the determination of the average thickness and the refractive index of the lms with accuracies better than 1%, as well as the average amplitude of the surface roughness with an accuracy of about 2%. Amorphous As40S60 thin lms have been deposited by spin coating, ontoglass substrates, from a solution of the bulk material in n-propylamine. Indications of the surface roughness in these lms were found from total (specular plus diuse) reectance measurements using an integrating sphere, and also from mechanical measurements using a stylus proler. The latter technique provided a value for the average surface roughness of 20 ? 4 nm, which is in excellent agreement with the optically determined value of 17.4? 0.4 nm.
Czech name
Určení drsnosti povrchu a indexu lomu amorfních filmů As40S60 připravených metodou "spin coating"
Czech description
Byla studována drsnost povrchu a index lomu amorfních filmů As40S60 připravených metodou "spin coating"

Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
CA - Inorganic chemistry
OECD FORD branch
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Publication year
2004
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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