Structural and optical characterization of amorphous As40S60 and As40Se60 lms prepared by plasma-enhanced chemical vapor deposition
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216275%3A25310%2F04%3A00001378" target="_blank" >RIV/00216275:25310/04:00001378 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Structural and optical characterization of amorphous As40S60 and As40Se60 lms prepared by plasma-enhanced chemical vapor deposition
Original language description
Amorphous chalcogenide lms of chemical compositions As40S60 and As40Se60 have been prepared by plasma-enhanced chemical vapor deposition.An improved optical characterization method suitable for non-uniform thin lms, which also takes into consideration the weak absorption in the substrate, has successfully been applied.The values of the average thickness and thickness variation, d and Dd, respectively, were crossed-checked with those measured by use of a surface-proling stylus instrument, and dierences between the directly measured and the optically calculated values were, in all cases, less than 2%.A comparison between the structural and optical properties of these PECVD lms, and those of the same chemical composition prepared by thermal evaporation, is systematically made in this paper.
Czech name
Strukturní a optická charakterizace amorfních tenkých filmů As40S60 a As40Se60 připravených metodou CVD
Czech description
Byly spřipraveny a charakterizovány amorfní tenké filmy As40S60 a As40Se60 připravených metodou plasma-enhanced CVD
Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
CA - Inorganic chemistry
OECD FORD branch
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Result continuities
Project
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Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2004
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Journal of Non-Crystalline Solids
ISSN
0022-3093
e-ISSN
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Volume of the periodical
N
Issue of the periodical within the volume
345&346
Country of publishing house
NL - THE KINGDOM OF THE NETHERLANDS
Number of pages
5
Pages from-to
88-92
UT code for WoS article
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EID of the result in the Scopus database
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