Development of chalcogenide glass photoresists for gray scale lithography
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216275%3A25310%2F06%3A00004626" target="_blank" >RIV/00216275:25310/06:00004626 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Development of chalcogenide glass photoresists for gray scale lithography
Original language description
Wet and dry negative etching procedures are evaluated for the fabrication of 3D graded microstructures in As-S based inorganic photoresists. Absorption of light and consequent photostructural changes near the surface layer enhance the chemical resistanceof the As-S films. The success of the procedure is demonstrated by fabricating arrays of 12 lm diameter microlenses in a thin As35S65 film using a gray scale Cr mask and wet etching. The selectivity of dry etching is successfully realized byusing photodiffusion in Ag-As2S3 bilayer structure. In this case, however, surface roughness or 'grass' is observed after etching. An unexpected segregation of silver is observed at the edges and at the boundary between the exposed and unexposed regions, which is investigated by SEM and XPS.
Czech name
Vývoj fotorezistu na bázi amorfního chalkogenidu pro gray scale litografii
Czech description
Práce se zabývá tvorbou 3D mikrostruktur v anorganických fotorezistech na bázi systému As-S mokrým a suchýmm leptáním. Mokrou cestou byla připravena mikročočková pole s průměrem mikročoček 12 mikronů. Selektivního leptání suchou cestou bylo dosaženo s využitím jevu fotoindukované difuze kovu v binárním systému Ag-As2S3. S využitím metod SEM a XPS byla prokázána segregace Ag na rozhraní exponovaná-neexponovaná vrstva.
Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
CA - Inorganic chemistry
OECD FORD branch
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Result continuities
Project
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Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2006
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Journal of Non-Crystalline Solids
ISSN
0022-3093
e-ISSN
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Volume of the periodical
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Issue of the periodical within the volume
352
Country of publishing house
NL - THE KINGDOM OF THE NETHERLANDS
Number of pages
6
Pages from-to
589-594
UT code for WoS article
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EID of the result in the Scopus database
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