Soft Imprint Lithography of a Bulk Chalcogenide Glass
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216275%3A25310%2F12%3A39896002" target="_blank" >RIV/00216275:25310/12:39896002 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Soft Imprint Lithography of a Bulk Chalcogenide Glass
Original language description
Soft imprint lithography using a PDMS mould [1] has been shown as an effective and straightforward method for micro- and nano-patterning of the surfaces of chalcogenide glass films [2]. Here, micrometre-scale (width ~4mým and depth ~0.8 mým) test patterns such as ribs, channels and a lens array were successfully imprinted into the surface of high refractive index As3S7 bulk glass at 225°C without any applied external pressure. The mean-square roughness of the patterned glass surface is in the range 3 -10 nm [3]. Using commercially available nano-imprinters, soft imprinting of bulk chalcogenide glasses shows great promise for the reproducible fabrication of optical and photonic devices over large surface areas. The high refractive index of chalcogenideglasses could be exploited in the design and fabrication of diffractive optical elements for the infrared region, e.g. for filtering light of selected spectral range or patterning of anti-reflection surfaces as lens arrays with optical p
Czech name
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Czech description
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Classification
Type
O - Miscellaneous
CEP classification
CA - Inorganic chemistry
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2012
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů