Pulsed laser deposited alumina thin films

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216275%3A25310%2F16%3A39901468" target="_blank" >RIV/00216275:25310/16:39901468 - isvavai.cz</a>

Result on the web

<a href="http://dx.doi.org/10.1016/j.ceramint.2015.09.048" target="_blank" >http://dx.doi.org/10.1016/j.ceramint.2015.09.048</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.ceramint.2015.09.048" target="_blank" >10.1016/j.ceramint.2015.09.048</a>

Result language

angličtina

Original language name

Pulsed laser deposited alumina thin films

Original language description

Thin films of amorphous alumina were fabricated using pulsed laser deposition. Topography, structural, and optical properties of alumina films were investigated depending on process parameters, specifically deposition time under vacuum and partial pressure of argon. Deposited films present good uniformity with RMS roughness ranging from 0.35 to 2.50 nm. Alumina films with thickness lower than 40 nm deposited under vacuum present a non-negligible void content that induces a decrease of the effective refractive index of the layers. Furthermore, introduction of argon gas (at 5 x 10(-4) and 5 x 10(-2) mbar) during the deposition process induces grainy structure of the thin films documented by an increase of RMS roughness from 0.35 to 1.5 nm. A decrease of the alumina layers' refractive index is observed in the 300-7500 nm spectral range when increasing Ar pressure.

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

JH - Ceramics, fire-proof materials and glass

OECD FORD branch

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Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2016

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Ceramics International

ISSN

0272-8842

e-ISSN

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Volume of the periodical

42

Issue of the periodical within the volume

1

Country of publishing house

GB - UNITED KINGDOM

Number of pages

6

Pages from-to

1177-1182

UT code for WoS article

000365367000021

EID of the result in the Scopus database

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