Electron beam induced changes in optical properties of glassy As35S65 chalcogenide thin films studied by imaging ellipsometry

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216275%3A25310%2F18%3A39912712" target="_blank" >RIV/00216275:25310/18:39912712 - isvavai.cz</a>

Result on the web

<a href="https://www.sciencedirect.com/science/article/pii/S0040609018302293?via%3Dihub" target="_blank" >https://www.sciencedirect.com/science/article/pii/S0040609018302293?via%3Dihub</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.tsf.2018.03.079" target="_blank" >10.1016/j.tsf.2018.03.079</a>

Result language

angličtina

Original language name

Electron beam induced changes in optical properties of glassy As35S65 chalcogenide thin films studied by imaging ellipsometry

Original language description

Spectroscopic imaging ellipsometry was used to study 50 mu m x 50 mu m squares recorded into glassy As35S65 thin film by electron beam with different exposure doses. Optical constants (refractive index n and extinction coefficient k) of electron exposed areas were determined from imaging ellipsometric data recorded over a spectral range 390-800 nm. Complex dielectric permittivity of each of electron exposed square (glassy As35S65 with different electron exposure dose) was parametrized by a Tauc-Lorentz oscillator. Gradient optical model with the refractive index changing linearly within the layer thickness was used. Evaluation of parameters of Tauc-Lorentz oscillator revealed decrease of energy bandgap, increase of the refractive index in whole recorded spectra (more pronounced at the top of the film) and increase of extinction coefficient in the part of spectra where the material absorbs with the increasing electron exposure dose used for exposure of the squares. The decrease in local disorder with increasing electron exposure dose is quantified from the short wavelength absorption edge onset using a Mott-Davis model. The dependence of the parameters of Wemple-DiDomenico model for the transparent part of the optical constants spectra on electron exposure dose is shown. Thin film with recorded image was subsequently etched in amine based solution in aprotic solvent. While native film was fully etched off the remaining height of the exposed areas is increasing with the increasing electron exposure dose used. Knowledge of the changes of optical properties and etching rates induced by electron beam of different exposure doses can be used for fabricating of optical elements by high resolution electron beam lithography.

Czech name

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Czech description

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Type

J_imp - Article in a specialist periodical, which is included in the Web of Science database

CEP classification

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OECD FORD branch

10302 - Condensed matter physics (including formerly solid state physics, supercond.)

Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2018

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Thin Solid Films

ISSN

0040-6090

e-ISSN

—

Volume of the periodical

660

Issue of the periodical within the volume

August

Country of publishing house

NL - THE KINGDOM OF THE NETHERLANDS

Number of pages

7

Pages from-to

759-765

UT code for WoS article

000441177500107

EID of the result in the Scopus database

2-s2.0-85044752207