Large (GeTe):(Sb2Te3) ratio phase change memory thin films
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216275%3A25310%2F18%3A39912753" target="_blank" >RIV/00216275:25310/18:39912753 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1117/12.2306503" target="_blank" >http://dx.doi.org/10.1117/12.2306503</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1117/12.2306503" target="_blank" >10.1117/12.2306503</a>
Alternative languages
Result language
angličtina
Original language name
Large (GeTe):(Sb2Te3) ratio phase change memory thin films
Original language description
Phase change memory thin films from Ge-Sb-Te system with large (GeTe):(Sb2Te3) ratio have been deposited via UV pulsed laser deposition technique. The studied compositions were Ge6Sb2Te9, Ge8Sb2Te11, Ge10Sb2Te13, and Ge12Sb2Te15. Physico-chemical properties of the Ge-Sb-Te thin films, based on the scanning electron microscopy with energy-dispersive X-ray analysis, X-ray diffraction and reflectometry, atomic force microscopy, optical reflectivity, sheet resistance temperature dependences, and variable angle spectroscopic ellipsometry measurements, were studied in order to assess the effect of chemical composition of the deposited layers. All the obtained data confirm the importance of GeTe content in (GeTe)1-x(Sb2Te3)x thin films.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
—
OECD FORD branch
10402 - Inorganic and nuclear chemistry
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2018
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Proceedings of SPIE. Vol. 10683
ISBN
978-1-5106-1892-3
ISSN
0277-786X
e-ISSN
neuvedeno
Number of pages
7
Pages from-to
"106830A-1"-"106830A-7"
Publisher name
SPIE - The International Society for Optical Engineering
Place of publication
Bellingham
Event location
Štrasburg
Event date
Apr 22, 2018
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
000450857500008