Bixbyite-Ta2N2O film prepared by HiPIMS and postdeposition annealing: Structure and properties

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216275%3A25310%2F20%3A39916445" target="_blank" >RIV/00216275:25310/20:39916445 - isvavai.cz</a>
Alternative codes found
RIV/49777513:23520/20:43958594
Result on the web
<a href="https://avs.scitation.org/doi/full/10.1116/6.0000066" target="_blank" >https://avs.scitation.org/doi/full/10.1116/6.0000066</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1116/6.0000066" target="_blank" >10.1116/6.0000066</a>

Result language
angličtina
Original language name
Bixbyite-Ta2N2O film prepared by HiPIMS and postdeposition annealing: Structure and properties
Original language description
High-power impulse magnetron sputtering of a Ta target in precisely controlled Ar +O 2 +N 2 gas mixtures was used to prepare amorphous N-rich tantalum oxynitride (Ta-O-N) films with a finely varied elemental composition. Postdeposition annealing of the films at 900 degrees C for 5 min in vacuum led to their crystallization without any significant change in the elemental composition. The authors show that this approach allows preparation of a Ta-O-N film with a dominant Ta 2N 2O phase of the bixbyite structure. As far as the authors know, this phase has been neither experimentally nor theoretically reported yet. The film exhibits semiconducting properties characterized by two electrical (indirect or selection-rule forbidden) bandgaps of about 0.2 and 1.0 eV and one optical (direct and selection-rule allowed) bandgap of 2.0 eV (suitable for visible-light absorption up to 620 nm). This observation is in good agreement with the carried out ab initio calculations and the experimental data obtained by soft and hard X-ray photoelectron spectroscopy. Furthermore, the optical bandgap is appropriately positioned with respect to the redox potentials for water splitting, which makes this material an interesting candidate for this application.
Czech name
—
Czech description
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Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
—
OECD FORD branch
20506 - Coating and films

Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2020
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical
Journal of Vacuum Science & Technology. A: International Journal Devoted to Vacuum, Surfaces, and Films
ISSN
0734-2101
e-ISSN
—
Volume of the periodical
38
Issue of the periodical within the volume
3
Country of publishing house
US - UNITED STATES
Number of pages
10
Pages from-to
"033409-1"-"033409-10"
UT code for WoS article
000529406300001
EID of the result in the Scopus database
2-s2.0-85084056413

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