Effect of annealing on structure and properties of Ta–O–N films prepared by high power impulse magnetron sputtering

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F19%3A43953437" target="_blank" >RIV/49777513:23520/19:43953437 - isvavai.cz</a>
Result on the web
<a href="https://doi.org/10.1016/j.ceramint.2018.09.019" target="_blank" >https://doi.org/10.1016/j.ceramint.2018.09.019</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.ceramint.2018.09.019" target="_blank" >10.1016/j.ceramint.2018.09.019</a>

Result language
angličtina
Original language name
Effect of annealing on structure and properties of Ta–O–N films prepared by high power impulse magnetron sputtering
Original language description
High power impulse magnetron sputtering of a Ta target in various Ar + O2 + N2 gas mixtures was utilized to prepare amorphous tantalum oxynitride (Ta–O–N) films with a finely controlled elemental composition in a wide range. We investigate the effect of film annealing at 900 °C in vacuum on structure and properties of the films. We show that the finely tuned elemental composition in combination with the annealing enables the preparation of crystalline Ta–O–N films exhibiting a single TaON phase with a monoclinic lattice structure, refractive index of 2.65 and extinction coefficient of 0.02 (both at the wavelength of 550 nm), optical band gap width of 2.45 eV (suitable for visible light absorption up to 505 nm), low electrical resistivity of 0.4 Ω·cm (indicating enhanced charge transport in the material as compared to the as-deposited counterpart), and appropriate alignment of the band gap with respect to the redox potentials for water splitting. These films are therefore promising candidates for application as visible-light-driven photocatalysts for water splitting.
Czech name
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Czech description
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Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
20506 - Coating and films

Project
<a href="/en/project/LO1506" target="_blank" >LO1506: Sustainability support of the centre NTIS - New Technologies for the Information Society</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2019
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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