Optimum conditions for deposition of amorphous WS2 thin films and changes in structure and optical properties during solid state crystallization

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216275%3A25310%2F22%3A39919064" target="_blank" >RIV/00216275:25310/22:39919064 - isvavai.cz</a>
Result on the web
<a href="https://www.sciencedirect.com/science/article/pii/S0272884222026633" target="_blank" >https://www.sciencedirect.com/science/article/pii/S0272884222026633</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.ceramint.2022.07.236" target="_blank" >10.1016/j.ceramint.2022.07.236</a>

Result language
angličtina
Original language name
Optimum conditions for deposition of amorphous WS2 thin films and changes in structure and optical properties during solid state crystallization
Original language description
Transition metal dichalcogenides exhibit a unique properties, which make them interesting for fundamental studies and for applications in many fields of daily life. Here, we report on optimum conditions for deposition of amorphous stoichiometric WS2 thin films by (non-reactive) magnetron sputtering using a stoichiometric WS2 target and subsequent application of solid state crystallization of amorphous WS2 thin films for fabrication of crystalline WS2 over a large area. By ex-situ annealing of samples up to 1000 degrees C, we found that the optical contrast change occurs in two steps, which are separated by a plateau that exhibits a gradual increase in optical absorbance. We suggest that the dissociation of W-W homopolar bonds, associated with the transformation of 1T' -like symmetry into 2H-like symmetry units, plays a key role in the first abrupt change in the optical properties of WS2 thin films between 300 and 400 degrees C while the formation of excitons occurred between 700 and 1000 degrees C is associated with crystallization, as confirmed by X-ray photoelectron spectroscopy, X-ray diffraction and Scanning electron microscopy studies.
Czech name
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Czech description
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Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
20504 - Ceramics

Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2022
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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