Large area high-speed metrology SPM system Large area high-speed metrology SPM system Large area high-speed metrology SPM system
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26110%2F15%3APU112514" target="_blank" >RIV/00216305:26110/15:PU112514 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1088/0957-4484/26/6/065501" target="_blank" >http://dx.doi.org/10.1088/0957-4484/26/6/065501</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1088/0957-4484/26/6/065501" target="_blank" >10.1088/0957-4484/26/6/065501</a>
Alternative languages
Result language
angličtina
Original language name
Large area high-speed metrology SPM system Large area high-speed metrology SPM system Large area high-speed metrology SPM system
Original language description
We present a large area high-speed measuring system capable of rapidly generating nanometre resolution scanning probe microscopy data over mm2 regions. The system combines a slow moving but accurate large area XYZ scanner with a very fast but less accurate small area XY scanner. This arrangement enables very large areas to be scanned by stitching together the small, rapidly acquired, images from the fast XY scanner while simultaneously moving the slow XYZ scanner across the region of interest. In order to successfully merge the image sequences together two software approaches for calibrating the data from the fast scanner are described.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
20201 - Electrical and electronic engineering
Result continuities
Project
—
Continuities
S - Specificky vyzkum na vysokych skolach
Others
Publication year
2015
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
NANOTECHNOLOGY
ISSN
0957-4484
e-ISSN
1361-6528
Volume of the periodical
26
Issue of the periodical within the volume
6
Country of publishing house
GB - UNITED KINGDOM
Number of pages
10
Pages from-to
1-10
UT code for WoS article
000348448000012
EID of the result in the Scopus database
2-s2.0-84921632634