Large area high-speed metrology SPM system

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00177016%3A_____%2F15%3A%230001036" target="_blank" >RIV/00177016:_____/15:#0001036 - isvavai.cz</a>

Alternative codes found

RIV/00177016:_____/15:#0001227 RIV/00216305:26620/15:PU113712 RIV/00177016:_____/15:N0000007

Result on the web

<a href="http://stacks.iop.org/0957-4484/26/065501" target="_blank" >http://stacks.iop.org/0957-4484/26/065501</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1088/0957-4484/26/6/065501" target="_blank" >10.1088/0957-4484/26/6/065501</a>

Result language

angličtina

Original language name

Large area high-speed metrology SPM system

Original language description

We present a large area high-speed measuring system capable of rapidly generating nanometre resolution scanning probe microscopy data over mm2 regions. The system combines a slow moving but accurate large area XYZ scanner with a very fast but less accurate small area XY scanner. This arrangement enables very large areas to be scanned by stitching together the small, rapidly acquired, images from the fast XY scanner while simultaneously moving the slow XYZ scanner across the region of interest. In orderto successfully merge the image sequences together two software approaches for calibrating the data from the fast scanner are described. The first utilizes the low uncertainty interferometric sensors of the XYZ scanner while the second implements a genetic algorithm with multiple parameter fitting during the data merging step of the image stitching process. The basic uncertainty components related to these high-speed measurements are also discussed. Both techniques are shown to successfu

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

JB - Sensors, detecting elements, measurement and regulation

OECD FORD branch

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Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2015

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Nanotechnology

ISSN

0957-4484

e-ISSN

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Volume of the periodical

26

Issue of the periodical within the volume

6

Country of publishing house

GB - UNITED KINGDOM

Number of pages

9

Pages from-to

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UT code for WoS article

000348448000012

EID of the result in the Scopus database

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