Deposition of Ultrathin Films - Optimalisation of Ion Beam Optics

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26210%2F01%3APU22621" target="_blank" >RIV/00216305:26210/01:PU22621 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Deposition of Ultrathin Films - Optimalisation of Ion Beam Optics

Original language description

Direct Ion Beam Deposition is an advanced method for processing of thin films. Apparatus for this technique was developed in the Institute of Physical Engineering. The experiments with direct ion beam deposition showed necessity of improving ion optics.In this contribution, some results of ion beam optimization are presented and discussed.

Czech name

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Czech description

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Type

D - Article in proceedings

CEP classification

BM - Solid-state physics and magnetism

OECD FORD branch

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Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

2001

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection

Juniormat '01 sborník

ISBN

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ISSN

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e-ISSN

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Number of pages

2

Pages from-to

281-282

Publisher name

Fakulta strojního inženýrství VUT v Brně

Place of publication

Brno

Event location

Brno,VUT-FSI

Event date

Sep 19, 2001

Type of event by nationality

CST - Celostátní akce

UT code for WoS article

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