Surface profilometry by a parallel-mode confocal microscope

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26210%2F02%3APU30830" target="_blank" >RIV/00216305:26210/02:PU30830 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Surface profilometry by a parallel-mode confocal microscope
Original language description
Confocal imaging by a parallel-mode confocal mi-croscope is based on the real-time incoherent-holography technique. Besides the image amplitude, the image phase is inherently reconstructed. In this paper we prove that the phase image component can be converted into the height map, and, in this way, we measure the surface profile with the precision of several nanometers. Small height differences can be measured inside one optical section of the specimen surface, while the measurement of large differencces needs to connect more optical sections. The two procedures are demonstrated experimentally even for the surface with large and steep height changes. The ambiguity in the height determination from the image phase component is overcome by means of the depth discrimination property of the microscope. The axial resolution is improved using broadband illumination.
Czech name
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Czech description
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Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BH - Optics, masers and lasers
OECD FORD branch
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2002
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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