Surface profilometry by a holographic confocal microscopy

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26210%2F03%3APU41879" target="_blank" >RIV/00216305:26210/03:PU41879 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Surface profilometry by a holographic confocal microscopy

Original language description

Confocal imaging by a holographic confocal microscope is based on the real-time incoherent holography. Besides the image amplitude, the image phase is inherently reconstructed. In this paper, we demonstrate that the phase image component can be convertedinto the height map of the specimen surface, and, in this way, we can measure the surface profile with the precision of several nanometers. The possible ambiguity in the height determination of large height steps is overcome owing to the depth discriminnation property of the microscope. The axial resolution required for this purpose is achieved using broadband illumination.

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BH - Optics, masers and lasers

OECD FORD branch

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Project

<a href="/en/project/GA101%2F00%2F0974" target="_blank" >GA101/00/0974: Local probe microscopy with an optically trapped probe</a><br>

Continuities

Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

2003

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Optica Applicata

ISSN

0078-5466

e-ISSN

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Volume of the periodical

33

Issue of the periodical within the volume

2-3

Country of publishing house

PL - POLAND

Number of pages

9

Pages from-to

381-389

UT code for WoS article

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EID of the result in the Scopus database

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