UV-VIS Areal Reflectometry

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26210%2F05%3APU54234" target="_blank" >RIV/00216305:26210/05:PU54234 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

UV-VIS Areal Reflectometry

Original language description

Construction and the first experimental results of the new apparatus for areal imaging of the optical properties of nonabsorbing or weakly absorbing thin films will be presented. The system is based on the principles of the spectroscopic reflectometry[1]; observed sample is illuminated at various wavelengths (selected by a monochromator) in the UV-VIS region and the intensity of the reflected light is detected by a CCD camera. Optical parameters of the thin films 50 - 2000 nm thick can be consequently ccalculated from the reflectance spectra. Sample size and lateral resolution is customizable and depends on imaging optics. Unique construction allows both, ex situ and in situ measurements, the computer control provides fast measurements and data acqusition. The apparatus can be used for the feedback control of various thin film processing. In the contribution application examples will be presented.

Czech name

UV-VIS plošná reflektometrie

Czech description

Jsou prezentovány první výsledky a konstrukční provedení zařízení pro in-situ plošné zobrazování a sledování optických vlastností neabsorbujících bebo slabě absorbujících tenkých vrstev.

Type

A - Audiovisual production

CEP classification

BM - Solid-state physics and magnetism

OECD FORD branch

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Project

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Continuities

Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

2005

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

ISBN

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Place of publication

Vienna

Publisher/client name

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Version

1

Carrier ID

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