Hybrid Laser-Magnetron Deposition of TiC and TiCN Thin Films
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26210%2F08%3APU78250" target="_blank" >RIV/00216305:26210/08:PU78250 - isvavai.cz</a>
Alternative codes found
RIV/60162694:G43__/08:#0001806
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Hybrid Laser-Magnetron Deposition of TiC and TiCN Thin Films
Original language description
Hybrid laser-magnetron deposition systéme was developed and tested for study carbon based thin films. Films were fabricated in argon (TiC) and in argon/nitrogen (TiCN). Crystaline films were grown at room substrate temperature. Film properties were studied by SEM, XRD, XPS and GDOES
Czech name
Hybridní laserová-magnetronová depozice TiC a TiCN
Czech description
Depoziční systém pro hybridní laserovou-magnetronovou depozici byl navržen a testován pro studium tenkých povlaků na základě uhlíku. Tenké povlaky byly vytvářeny v atmosféře argonu nebo směsi argonu a dusíku. Byly vytvořeny krystalické povlaky i za pokojové teploty. Vlastnosti vytvořených povlaků byly hodnoceni metodami SEM, XRD, XPS a GDOES
Classification
Type
D - Article in proceedings
CEP classification
JG - Metallurgy, metal materials
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
S - Specificky vyzkum na vysokych skolach
Others
Publication year
2008
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
9th ABA
ISBN
978-80-214-3659-6
ISSN
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e-ISSN
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Number of pages
5
Pages from-to
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Publisher name
Brno University of Technology
Place of publication
Brno
Event location
Brno
Event date
Jun 29, 2008
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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