Imaging spectroscopic reflectometer based on pellicle beamsplitter

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26210%2F15%3APU115423" target="_blank" >RIV/00216305:26210/15:PU115423 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1117/12.2190947" target="_blank" >http://dx.doi.org/10.1117/12.2190947</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1117/12.2190947" target="_blank" >10.1117/12.2190947</a>

Result language
angličtina
Original language name
Imaging spectroscopic reflectometer based on pellicle beamsplitter
Original language description
Imaging spectroscopic reflectometry is a technique suitable for measurements of local optical parameters (thickness, refraction index and index of extinction) of non-uniform thin films along their surface. It is usually assumed that gradients of these non-uniformities are reasonably small. A new design of an imaging spectroscopic reflectometer provides the possibility to successfully measure high gradient non-uniformities along relatively large area of a thin film surface. A specialized low cost apparatus was developed to accomplish a higher resolution of surface imaging at the cost of reduction of the spectral range usable. The whole concept of the imaging spectroscopic reflectometer was designed to achieve high light throughput using only prefabricated optical components. Shorter measurement times and lower demands on an imaging camera used were achieved. The imaging spectroscopic reflectometer mentioned above was realized as a compact device with easy calibration and handling. Any m
Czech name
—
Czech description
—

Publication year
2015
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
Optical Systems Design 2015: Optical Design and Engineering VI
ISBN
9781628418156
ISSN
0277-786X
e-ISSN
—
Number of pages
8
Pages from-to
"2L-1"-"2L-8"
Publisher name
Neuveden
Place of publication
Neuveden
Event location
Jena
Event date
Sep 7, 2015
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
000366812400073

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